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Former ASML head scientist Lin Nan drives China’s latest EUV breakthrough

Research team achieves world-class results in photolithography research with solid-state laser-driven approach, paper shows.

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Apr 28, 2025 - 15:00
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Former ASML head scientist Lin Nan drives China’s latest EUV breakthrough
Research team achieves world-class results in photolithography research with solid-state laser-driven approach, paper shows.
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